GO XYR HV
Product Specification
The GO XYR stage moves loads of up to 10 kg with nanometer precision along the X- and Y-axis, as well as around the Z-axis and is available in both standard and High Vacuum versions.
The PRECIBEO GO Stage HV is built for high vacuum environments down to 10-4 Pa. Each stage is fitted with a vacuum side cable (PTFE coated wires in a braided metal sleeve) ended with a female D9SUB connector.
Each stage also comes with an air side female D9SUB to ix-Industrial cable. Connect the vacuum side and air side cables to your D9SUB feedthrough, the air side ix-connector to the GO Controller, and you are ready to GO!
All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering Smooth Continuous Motion, Fast Step & Settling Times and that are Self-Locking at Rest.
Positioning
Travel (X, Y)
+-10 mm
Travel Θ(Z)
Minimum Incremental Motion (X, Y)
+- 10°
2 nm
Minimum Incremental Motion Θ(Z)
< 0,1 µrad
Repeatability (X, Y)
+- 200 nm
Repeatability Θ(Z)
+- 15 µrad
The Space Between Us
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