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GO TipTilt HV

GO TipTilt HV.jpg

Product Specification

The GO TipTilt High Vacuum stage moves loads of up to 2,5 kg with nanometer precision along the Z-axis, as well as around the X-axis and the Y-axis in vaccum surrounding.

 

All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering Smooth Continuous Motion, Fast Step & Settling Times and that are Self-Locking at Rest.

Positioning

Travel (Z)

+-10 mm

Travel Θ(X, Y)

Minimum Incremental Motion (Z)

+- 9°

2 nm

Minimum Incremental Motion Θ(X, Y)

< 0,1 µrad

Repeatability (Z)

+- 200 nm

Repeatability Θ(Z)

+- 15 µrad

The Space Between Us

Explore artwork that captures the subtle connections and meaningful gaps that define the human experience.

Motion

Maximum Operating Force (Push/Pull)

(Z) 15 N (MIN.)

Holding Force (When Power Is Off)

(Z) 18 N (MIN.)

Maximum Speed At No Load (Z)

8 mm/s

Maximum Speed With Max Load On Top Plate (Z)

>5 mm/s 

Drive Type 

Motor Type

PRECIBEO GO Stage LLS4545

Mechanical 

Maximum Load Centered on Top

1 kg

Diameter

150 mm

Height

92 mm

Miscellaneous 

Vacuum Side Cables

1 m cable (+-5%) with f. D9SUB connector

Air Side Cables

2 m cable (+-5%) with f. D9SUB & ix Industrial™ connectors

Material

Aluminum​

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