GO LINEAR STAGE 6545 HV
Product Specification
The mid stage in the 45-series, available in both standard and High Vacuum versions, offers a footprint of 65x45 mm, a travel range of 35 mm, and 5 N or 10 N operating lift force.
The PRECIBEO GO Stage HV is built for high vacuum environments down to 10-4 Pa. Each stage is fitted with a vacuum side cable (PTFE coated wires in a braided metal sleeve) ended with a female D9SUB connector.
Each stage also comes with an air side female D9SUB to ix-Industrial cable. Connect the vacuum side and air side cables to your D9SUB feedthrough, the air side ix-connector to the GO Controller, and you are ready to GO!
All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering Smooth Continuous Motion, Fast Step & Settling Times and that are Self-Locking at Rest.
Positioning
Travel
35 mm
Position Sensor
Sensor Resolution
Optical Encoder
2 nm
Minimum Incremental Motion
2 nm
Bidirectional Repeatability
+- 100nm (typ. @ full travel)
Straightness & Flatness
+- 2 µm (typ.)
Pitch
+- 150 µrad (typ.)
Yaw
+- 150 µrad (typ.)
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